Ultrahigh-Purity IGC® II Integrated Gas Components
The Swagelok® IGC II system consists of lightweight, easy-to-assemble components and standard hardware customizable for any flow configuration. Metal seals help prevent the absorption or permeation of gas, making the system an ideal ultrahigh-purity solution. Complimentary IGC II System Configurator tool simplifies component selection, layout, and ordering.
A typical IGC II system consists of three layers—a substrate assembly, a manifold assembly, and mounting components.
- The substrate assembly provides the flow path for the process gas through the gas stick
- The manifold assembly provides the flow path between two or more parallel gas sticks
- The substrate-manifold assembly accepts any 1.5 in. (38.1 mm) C-ring surface-mount component
- A conversion plate provides the mounting capacity for a mass flow controller, and a tube port is available to provide a 1/4 in. vertical tube port on a manifold or substrate
- Low-pressure diaphragm valves, DP series
- Bellows-sealed metering valves, BM series
- Atomic layer deposition valves, ALD valves
- High-flow regulators, HF series
- Ultrahigh-purity pressure gauges, PGU series
- Ultrahigh-purity pressure transducers, PTU series
Gaskets and Gasket Assemblies
- C-ring style seal for a 1.5 in. (38.1 mm) modular system
- 316L stainless steel material of construction
- Helium leak-tight integrity to less than 1 × 10–9 std cm3/s
|Pressure Rating at 70°F (20°C)
||3000 psig (206 bar)
||248°F (120°C) operating
302°F (150°C) bakeout
||316L VIM-VAR stainless steel
|Internal Surface Finish
||5 µin. (0.13 µm) Ra
Discover more about how Swagelok products can work for you. Browse our catalogs or locate a sales and service center.
"Safe Product Selection:
The complete catalog contents must be reviewed to ensure that the system designer and user make a safe product selection. When selecting products, the total system design must be considered to ensure safe, trouble-free performance. Function, material compatibility, adequate ratings, proper installation, operation, and maintenance are the responsibilities of the system designer and user.
Do not mix or interchange product components with those of other manufacturers."